CCD Image Sensors in Deep-Ultraviolet

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CCD Image Sensors in Deep-Ultraviolet: Degradation Behavior and Damage Mechanisms (Microtechnology and MEMS)
by Flora Li and Arokia Nathan



Hardcover: 231 pages
Publisher: Springer; 1 edition (April 19, 2005)
Language: English
ISBN-10: 354022680X
ISBN-13: 9783540226802


Product Description
In order to facilitate the inspection of deep sub-micron features in integrated circuits, a new generation of semiconductor inspection systems is being pushed to new limits to image at ever shorter wavelengths - using deep-UV (DUV) sensitive cameras. However, conventional CCD cameras have very poor responsivity in the DUV and their stability upon prolonged DUV exposure is a relevant concern. This book investigates the causes of CCD degradation and the damage mechanisms due to DUV exposure, as well as reporting new results for device performance at these wavelengths.


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